South Korea develops key semiconductor gas technology

June 11 (Asia Today) -- South Korean researchers have developed a domestic production technology for high-purity deuterated ammonia, a key material used in semiconductor manufacturing, the Korea Institute of Energy Research said Wednesday.

The institute said a research team led by Yoon Hyung-chul succeeded in producing 7.7 kilograms of deuterated ammonia a day using a ruthenium catalyst developed by the team.

Deuterated ammonia, or ND₃, is a form of ammonia in which hydrogen atoms are replaced with deuterium, a stable isotope of hydrogen. When used in semiconductor manufacturing, the material can help suppress defects inside semiconductor devices.

South Korea has lacked the technology and facilities to produce deuterated ammonia domestically, leaving the country dependent on imports from Japan, China and other countries.

The catalyst developed by the research team reduced the pressure required for conventional deuterated ammonia synthesis to about one-fifth of the previous level. It also improved temperature conditions, making it possible to synthesize deuterated ammonia with a purity of more than 99%.

The team verified the process through more than 1,000 hours of continuous operation and obtained certification from the Korea Testing Laboratory.

Researchers also confirmed that the process did not generate impurities that could affect semiconductor performance, allowing stable production of ultra-high-purity deuterated ammonia.

The institute said the technology could help South Korea build a domestic production base, reduce import dependence and eventually enter the global specialty gas market.

The research team plans to optimize the process and expand production capacity to target isotope materials used in the semiconductor, display and precision chemical industries.

"This achievement is meaningful because it demonstrates the possibility of producing high-value isotope materials used in semiconductor processes through South Korea's own ammonia synthesis technology," Yoon said.

"Based on long-term stable operation experience and low-pressure, low-temperature process technology, the system could be expanded into a small-scale, high-function chemical materials production platform for the semiconductor, display and precision analysis industries," he said.

-- Reported by Asia Today; translated by UPI

Original Korean report: https://www.asiatoday.co.kr/kn/view.php?key=20260611010004062